HORIZONTAL CLEANING EQUIPMENT : SFC300XH
HORIZONTAL CLEANING EQUIPMENT : SFC300XH
Dedicated to single side substrate cleaning
Sized for up to 350mm substrates
Up to 3 process arms : High pressure, brush, chemical dispense, MegPie™…
Up to 4 different process chemicals
Do not hesitate to contact us, for detailed information !
Click here to see “Available Options”
BENEFITS : Modular, scalable & user friendly.
Buy what you require now. Upgrade later for future needs !
European manufacturing
Fully secured system (vibration sensor optional) : CE certified
Easy to use – User friendly HMI
- Fully programmable software
- Easy to make trials on your application
- Local & fast support
Smart maintenance design :
Easy maintenance access by front side
- Easy entire cleaning chamber replacement
- Possible upgrade with various arms (Brush, Megasonic, high pressure, dispense…)
Ecofriendly :
- MegPie™ (PROSYS) allows to use milder chemicals, which can be processed at lower temperatures
- Controlled consumption of supplies (DI water, N2 , …)
- Sustainable design
Overall dimensions :
- Width 750mm X Depth 900mm X Height 2000mm max
- Possibility to have the control panel/HMI arm on the right or on the left
- Loading height : 1050mm
- Weight : 300 kg
CHASSIS (electropolished stainless steel) including :
- Electric controller bay
- Fluidic panel & piping (configuration depending on customer’s applications)
CHAMBER :
- Modular horizontal cleaning chamber, up to 3 oscillating arms as standard
- Rest positions with bleed cones outside the process area
- Chemicals : up to 4 types
- Materials : 20mm thick polypropylene, increases rigidity
- Compatible with any kind of process using soap, DI water & many dilute chemicals
- Chamber inner diameter : 350mm
- Mist exhaust
- Motorized and secured lid opening with 2 buttons and electric actuator
LID : (custom made possible)
- Fully electropolished stainless steel
- Fully polycarbonate
- Polycarbonate & electropolished stainless steel
- Electric actuator for a motorized and secured lid opening
SPINDLE : (adapted to any size of chucks)
- Programmable brushless servo-motor, speed from 3 to 2500 rpm
N2 back pressure around the motor axis
- ESD safe design
CONTROL PANEL : PC based software with different administration levels
- Customizable software architecture
- Unlimited number of recipes
- Real time display of process steps
- Log management
- Remote connection possible