B4C cleaning

TOOLS & PROCESSES

OUR SOLUTIONS

DEVICES, tools, to cover all processes below :

  • Megasonic 
  • Brush
  • High pressure
  • Dispense

PROCESSES :

  • Resist cleaning
  • Stripping
  • Lift-off
  • Via and TSV cleaning
  • Post-CMP cleaning
  • Pre-bond cleaning
  • Post-dicing cleaning
  • Glass cleaning
  • Lens cleaning
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