OUR DEMO SYSTEM
DEMONSTRATION MACHINE
Your are welcome to visit us in Chambéry, to see our demo equipment : The Horizontal SFC300XH. Equiped with 3 arms (brush, MegPie™ & high pressure), to check many single wafer or substrates processes (read below)
We can :
- Make trials with adapted recipes on series of samples representing your production
- Process up to 12″ wafers or wafers on frame
- Clean up to 9″ masks
- Clean “coupon” on film frame OR other substrates
- Create special chucks when needed
- Process various chemicals (DMSO, Intelligent Fluid), rinsing with DI water…
To :
- Show the capability of our cleaning equipment & processes
- Help you to define the configuration & processes adapted to your needs
- Develop for you, YOUR OWN solution
- Improve or change your current processes
D.O.E (Design of experiment) :
The tests to be done are discussed upfront with the customer engineers, and the DOE methods can be applied
Inspection :
Magnification on microscope
Before demo
After demo