B4C cleaning

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AVAILABLE OPTIONS

CHOOSE your options = CUSTOMIZE your equipment !

THE AVAILABLE OPTIONS

Allow you to customize the equipment for your applications.

CHUCKS / ARMS / OTHER OPTIONS : Vacuum, Rinsing, Drying, Re-ionizing / CABINETS / CANISTERS

1. CHUCKS : Developed to adapt our system to customer’s substrates. Horizontal SFC300XH
  • All types of chuck to support wafers (2” to 12” as standard)
  • Masks (up to 9” standard), frames, and substrates
  • Chuck plates supporting x substrates in parallel
  • Design made according to customer specifications
  • Dimensions up to 350mm
Vertical DFC450XV
  • Same as above
  • Dimensions up to 450mm
Chuck
Chuck
Chuck
chuck
Chuck

2. ARMS :

Fully programmable motorized movements (Position, Speed)

Vertical & horizontal movement with same mechanism for all arms

Highly precise vertical movement

Up to 4 chemical dispenses on each arm (except for high pressure)

The dispense pipes are placed inside the arm (so, not visible)

Cycle dispensing possible (x sec ON – y sec OFF)

Megasonic

Horizontal SFC300XH

  • Adapted to Prosys MegPie™ solutions up to 300mm (especially useful to increase chemical efficiency)
  • Megasonic power programmable in the recipe steps
  • Feedback of power & temperatures displayed in the operator screen
  • MegPie™ parking position maintains the surface continuously wet

Brush 

Horizontal SFC300XH

  • Brush rotation agitates the chemical (soft cleaning)
  • Brush rotation in contact with the substrate (mechanical cleaning)
  • The brush motor is directly placed in the arm (eliminates complicated mechanics)

Vertical DFC450XV

  • Same as above +
  • 2 brushes activated with 2 separate motors
  • Motorized brush spacing adjustement
RECT BLANC Moitié 040526
Megasonic Arm 040526
Megasonic Arm
RECT BLANC Quart 040526
Simple Brush
Double Brush
Single Brush & Double Brush Arm

High Pressure 

Horizontal SFC300XH

  • Different nozzle types possible
  • High pressure pump adapted to the pressure range (5, 10, 50 up to 200 bars)
  • Pressure programmable in the recipe steps
  • Vertical motorized movement (optional extra)

+ Vertical DFC450XV

  • Same as above

Dispense

Horizontal SFC300XH

  • Different nozzle types possible
  • Volumetric dispensing (optional extra)
Double High Pressure
2 Types of High Pressure Arms

3. OTHER OPTIONS : 

Vacuum, Rinsing, Drying, Re-ionizing…

 

Vacuum

Horizontal SFC300XH

  • Including the necessary valves, water trap & N2  impulse for vacuum release

Rinsing

Horizontal SFC300XH

  • Chamber rinsing
  • Front side rinsing (can be done with any arm)
  • Back side rinsing

Vertical DFC450XV

  • Chamber rinsing
  • Front & back side rinsing (can be done with any arm)

Drying

Horizontal SFC300XH

  • N2 Front side drying can be done with any arm
  • N2 Back side drying
  • Infrared front side drying with lamps installed in the lid (full stainless steel lid only)

Vertical DFC450XV

  • N2 Front & back side drying can be done with any arm

Re-Ionizing

Horizontal SFC300XH

  • DI Water re-ionizing by injecting CO2 to avoid ESD due to high pressure
  • Air ionizer in the chamber

Vertical DFC450XV

  • Same as above

4. CABINETS (Chemical heating and/or mixing) :

Clean room compatible ; can be put in  grey areas

Stand alone system to supply heated & mixed chemicals to our 2 models OR any cleaning equipment on the market

Recirculation possible for heated chemicals

B4C Cleaning equipment, drives the cabinets via Ethernet modbus communication.

 

5. CANISTERS :

Pressurized tank to supply already prepared chemicals for our 2 models

All canisters capacities are possible from 3 to 20 litres

Canisters will be put outside B4C Cleaning equipment or in grey areas

If possible, we can also install a canister up to 5 litres capacity, in the chassis

The B4C Cleaning equipment will pressurize canisters at the start of the recipe and depressurize them, at the end.

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